Ashing of photoresists using dielectric barrier discharge cryoplasmas
نویسندگان
چکیده
منابع مشابه
Surface Decontamination by Dielectric Barrier Discharge Plasma
Background: Dielectric barrier discharge (DBD), a source of non-thermal plasma, is used in surface decontamination. Objective: To study the effect of DBD plasma treatment, we evaluated the effect of plasma exposure time on inactivation of Bacillus subtilis. Results: Applying the DBD plasma to the culture of B. subtilis caused complete sterilization of the surface without any thermal effects. In...
متن کاملsurface decontamination by dielectric barrier discharge plasma
background: dielectric barrier discharge (dbd), a source of non-thermal plasma, is used in surface decontamination. objective: to study the effect of dbd plasma treatment, we evaluated the effect of plasma exposure time on inactivation of bacillus subtilis. results: applying the dbd plasma to the culture of b. subtilis caused complete sterilization of the surface without any thermal effects. in...
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Glow discharge at atmospheric pressure using a dielectric barrier discharge can induce fluid flow, and operate as an actuator for flow control. In this paper, we simulate the physics of a 2-D asymmetric actuator operating in Helium gas using a high-fidelity first principles-based numerical modeling approach to help improve our understanding of the physical mechanisms associated with such actuat...
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Plasma sterilization offers a faster, less toxic and versatile alternative to conventional sterilization methods. Using a relatively small, low temperature, atmospheric, dielectric barrier discharge surface plasma generator, we achieved ≥ 6 log reduction in concentration of vegetative bacterial and yeast cells within 4 minutes and ≥ 6 log reduction of Geobacillus stearothermophilus spores withi...
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In this paper, using a one-dimensional simulation model, the reforming process of sour gas, i.e. CH4, CO2, and H2S, to the various charged particles and syngas in a dielectric barrier discharge (DBD) reactor is studied. An electric field is applied across the reactor radius, and thus a non-thermal plasma discharge is formed within the reactor. Based on the space...
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ژورنال
عنوان ژورنال: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
سال: 2013
ISSN: 2166-2746,2166-2754
DOI: 10.1116/1.4825202